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On the resonance of acoustic waves in slightly deformed and slowly moving slabs

✍ Scribed by H. I. Abdel-Gawad


Publisher
Springer
Year
1995
Tongue
English
Weight
568 KB
Volume
29
Category
Article
ISSN
0022-0833

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## Abstract On‐wafer parameter extraction in thin‐film bulk acoustic wave resonator (FBAR) embedded on its substrate is performed. The extraction algorithm implements a multistep least‐squares optimization strategy, obtaining the equivalent‐circuit parameters of both FBAR and its substrate from exp