On the relationship between stress induced leakage currents and catastrophic breakdown in ultra-thin SiO2 based dielectrics

✍ Scribed by D.A. Buchanan; J.H. Stathis; E. Cartier; D.J. DiMaria

• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 271 KB
• Volume: 36
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(97)00075-0