𝔖 Bobbio Scriptorium
✦   LIBER   ✦

On the performance of the TRIM simulation for the evaluation of auger depth profiles

✍ Scribed by Menyhard, M.

Publisher
John Wiley and Sons
Year
1998
Tongue
English
Weight
163 KB
Volume
26
Category
Article
ISSN
0142-2421

No coin nor oath required. For personal study only.

✦ Synopsis

Thin-Ðlm structures several monolayers thick can be observed by Auger depth proÐling if specimen rotation, grazing angle of incidence and low ion energy are used. To evaluate depth proÐles measured on such features, we developed a trial-and-error type of evaluation technique. First we simulated the depth proÐle for an arbitrary in-depth distribution using a dynamic TRIM code and then the Auger signal was calculated from the output of the TRIM simulation. It will be shown that using a single Ðtting parameter all depth proÐles measured on various layer structures could be properly evaluated. Based on our evaluation technique we can predict that a depth proÐle taken on a step-function-like transition is not sensitive to the quality of the interface. On the other hand, small changes in the interface of thin-layer structures result in clearly visible changes in the Auger depth proÐle. 1998 ( John Wiley & Sons, Ltd.

πŸ“œ SIMILAR VOLUMES

Influence of surface roughness on the de
Influence of surface roughness on the depth resolution of GDOES depth profiling analysis
✍ Shimizu, K.; Brown, G. M.; Habazaki, H.; Kobayashi, K.; Skeldon, P.; Thompson, G πŸ“‚ Article πŸ“… 1999 πŸ› John Wiley and Sons 🌐 English βš– 220 KB πŸ‘ 1 views

Radio-frequency-powered glow discharge optical emission spectroscopy (GDOES) is an extremely powerful and reliable technique for depth proÐling analysis of thin, insulating barrier anodic Ðlms formed on aluminium. It allows ready and rapid analysis of the Ðlms, with depth resolution and sensitivity

The impact of approximate evaluation on
The impact of approximate evaluation on the performance of search algorithms for warehouse scheduling
✍ Watson, J. P. (author);Rana, S. (author);Whitley, L. D. (author);Howe, A. E. (au πŸ“‚ Article πŸ“… 1999 πŸ› Springer Netherlands 🌐 English βš– 254 KB πŸ‘ 2 views

The Coors warehouse scheduling problem involves finding a permutation of customer orders that minimizes the average time that customers' orders spend at the loading docks while at the same time minimizing the running average inventory, Search-based solutions require fast objective functions. Thus, a

Influence of argon pressure on the depth
Influence of argon pressure on the depth resolution during GDOES depth profiling analysis of thin films
✍ Shimizu, K.; Habazaki, H.; Skeldon, P.; Thompson, G. E.; Wood, G. C. πŸ“‚ Article πŸ“… 2000 πŸ› John Wiley and Sons 🌐 English βš– 142 KB πŸ‘ 1 views

The influence of Ar pressure on depth resolution during glow discharge optical emission spectroscopy (GDOES) depth profiling has been examined through the use of 358 nm thick anodic alumina films grown over flat aluminium surfaces. The films are ideal standards for the present purpose, being amorpho