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On the oxidation mechanism of microcrystalline silicon thin films studied by Fourier transform infrared spectroscopy

โœ Scribed by A.C. Bronneberg; A.H.M. Smets; M. Creatore; M.C.M. van de Sanden


Book ID
116672554
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
688 KB
Volume
357
Category
Article
ISSN
0022-3093

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