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On the mechanism of thermally assisted ion-induced interface mixing

✍ Scribed by Yuji Horino; Noriaki Matsunami; Kenji Morita; Noriaki Itoh; Zuong-Lie Wang

Publisher
Elsevier Science
Year
1984
Tongue
English
Weight
221 KB
Volume
105
Category
Article
ISSN
0375-9601

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## Abstract To study the factors limiting the depth resolution of sputter depth profiling, we have examined the influence of ion mixing, ion beam‐induced roughness and temperature on the interface resolution of metallic bilayers consisting of Pt on top of Ni or Ti. We studied Pt/Ni and Pt/Ti interf