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On the Mechanism of Chemically Etching Germanium and Silicon

✍ Scribed by Turner, D. R.


Book ID
125450191
Publisher
The Electrochemical Society
Year
1960
Tongue
English
Weight
756 KB
Volume
107
Category
Article
ISSN
0013-4651

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Silver-assisted electroless etching mech
✍ Douani, R. ;Si-Larbi, K. ;Hadjersi, T. ;Megouda, N. ;Manseri, A. πŸ“‚ Article πŸ“… 2008 πŸ› John Wiley and Sons 🌐 English βš– 876 KB

## Abstract The morphology of metal‐assisted electroless etched n‐type silicon in HF–oxidizing agent–H~2~O etching system as a function of oxidizing type and etching time was studied. Three types of oxidizing agent were investigated: Na~2~S~2~O~8~, K~2~Cr~2~O~7~ and KMnO~4~. The layers formed on si