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On the measurement of electric constants of thin metallic films

Publisher: Elsevier Science
Year: 1956
Tongue: English
Weight: 91 KB
Volume: 6
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(56)90273-1

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In this study, we show that the optical constants of sputter-deposited chromium depend on the argon pressure used for the deposition. Higher argon pressure gives lower extinction coefficients. Sheet resistance measurements show that those materials with lower extinction coefficients also have lower