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On the Low-Temperature Internal Friction in Silicon

✍ Scribed by P. F. Kromer; L. P. Khiznichenko


Publisher
John Wiley and Sons
Year
1967
Tongue
English
Weight
402 KB
Volume
21
Category
Article
ISSN
0370-1972

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πŸ“œ SIMILAR VOLUMES


Internal friction of amorphous and nanoc
✍ Xiao Liu; C.L. Spiel; R.D. Merithew; R.O. Pohl; B.P. Nelson; Qi Wang; R.S. Crand πŸ“‚ Article πŸ“… 2006 πŸ› Elsevier Science 🌐 English βš– 617 KB

We measured the low temperature internal friction of a variety of hydrogenated amorphous, nanocrystalline, polycrystalline, and epitaxial silicon thin films. Most of the films studied are prepared either by hot-wire chemical-vapor deposition (HWCVD) or by plasma-enhanced chemical-vapor deposition (P