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On the Intrinsic Gettering in Cu-Contaminated CzSi

✍ Scribed by Schmalz, K. ;Kirscht, F.-G. ;Niese, S. ;Babanskaja, I. ;Kittler, M. ;Richter, H. ;Schöneich, J. ;Seifert, W.

Book ID
105378402
Publisher
John Wiley and Sons
Year
1985
Tongue
English
Weight
844 KB
Volume
89
Category
Article
ISSN
0031-8965

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The effect of oxygen on the reactions in the Si / Ta / Cu and Si / TaC / Cu metallization systems was investigated by utilizing the assessed Ta-O binary and the evaluated ternary Ta-C-O phase diagrams together with detailed transmission electron microscopy (TEM) and secondary ion mass spectrometry a