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On the Influence of Ar+ Ion Bombardment on the SiLVV Auger Line in Silicon Nitride Films

✍ Scribed by Jung, T. ;Titel, W.


Book ID
105379519
Publisher
John Wiley and Sons
Year
1986
Tongue
English
Weight
342 KB
Volume
98
Category
Article
ISSN
0031-8965

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