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On the formation of a wavy microrelief on an ion-beam-sputtered semiconductor surface

✍ Scribed by A. I. Grigor’ev

Book ID
118725138
Publisher
Springer
Year
2010
Tongue
English
Weight
183 KB
Volume
55
Category
Article
ISSN
1063-7842

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Mechanism of facet formation on Ni surfa
Mechanism of facet formation on Ni surfaces by sputtering with oxygen ion beams
✍ Kim, Kyung Joong; Jung, Kyung-Hoon 📂 Article 📅 1998 🏛 John Wiley and Sons 🌐 English ⚖ 616 KB

Surface topographic development by oxygen ion sputtering has been studied by scanning electron microscopy (SEM) for polycrystalline Ni and Cr surfaces. The topography was more developed on an Ni surface than a Cr surface. A facet-type topography with two faces was developed on an Ni surface by sputt