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Electrostatic mechanism of a wavy microrelief formation on a semiconductor surface sputtered by an ion beam

✍ Scribed by A. I. Grigor’ev


Book ID
110125477
Publisher
SP MAIK Nauka/Interperiodica
Year
2000
Tongue
English
Weight
43 KB
Volume
26
Category
Article
ISSN
1063-7850

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Mechanism of facet formation on Ni surfa
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Surface topographic development by oxygen ion sputtering has been studied by scanning electron microscopy (SEM) for polycrystalline Ni and Cr surfaces. The topography was more developed on an Ni surface than a Cr surface. A facet-type topography with two faces was developed on an Ni surface by sputt