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On the effects of implantation temperature in helium implanted silicon

โœ Scribed by Oliviero, E.; David, M. L.; Beaufort, M. F.; Barbot, J. F.; van Veen, A.

Book ID
120191361
Publisher
American Institute of Physics
Year
2002
Tongue
English
Weight
379 KB
Volume
81
Category
Article
ISSN
0003-6951

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