Ellipsometric Investigations of the Refr
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Deineka, A. ;Jastrabik, L. ;Suchaneck, G. ;Gerlach, G.
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Article
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2001
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John Wiley and Sons
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English
⚖ 65 KB
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Optical investigations of self-polarized PbZr 0.235 Ti 0.765 O 3 (PZT) films deposited onto Si/SiO 2 /adhesion layer/(111) Pt substrate by RF sputtering are presented in this work. Measurements were performed with a spectral ellipsometer working in rotating analyzer mode. To obtain the temperature d