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On the difference between optically and electrically determined resistivity of ultra-thin titanium nitride films

✍ Scribed by Van Bui, H.; Kovalgin, A.Y.; Wolters, R.A.M.


Book ID
122653299
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
848 KB
Volume
269
Category
Article
ISSN
0169-4332

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