Hydrogen influence on the electrical and optical properties of ZnO thin films grown under different atmospheres
โ Scribed by Lorite, I.; Wasik, J.; Michalsky, T.; Schmidt-Grund, R.; Esquinazi, P.
- Book ID
- 122138936
- Publisher
- Elsevier Science
- Year
- 2014
- Tongue
- English
- Weight
- 421 KB
- Volume
- 556
- Category
- Article
- ISSN
- 0040-6090
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๐ SIMILAR VOLUMES
## Abstract Transparent Zinc Oxide (ZnO) thin films have been grown on Si (100) and Sapphire (0001) substrates by RF magnetron sputtering for different growth time intervals (10, 30 and 60 min) to study the substrate and thickness effects. All the films have been grown at a substrate temperature of
a b s t r a c t ZnO thin films were treated by high-pressure hydrogen (H 2 ). Scanning electron microscope (SEM) images show that the surface morphology of ZnO films has been changed significantly by H 2 treatment. X-ray diffraction patterns show that the Zn(OH) 2 phases formed after H 2 treatment.