The current understanding of epitaxial C
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Dr. H. KΓΌhne
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Article
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1987
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John Wiley and Sons
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English
β 534 KB
\_ ~\_ \_ \_ \_ ~ H. KUHNE akadernie dcr Wissenschaften der DDR Institut fur Halbleiterphysik. Frankfurt (Oder) The Current Understanding of Epitaxial CVD Silicon Layer Doping in the Light of Modelling and Theory Development (IV) The Problem of More-than-one Kind of Dopant Species In Part I V of the