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On specimen preparation by radio frequency planar magnetron sputtering

✍ Scribed by Ochiai, Y.; Aso, K.; Hayakawa, M.; Matsuda, H.; Hayashi, K.; Ishikawa, W.; Iwasaki, Y.


Book ID
115454451
Publisher
AVS (American Vacuum Society)
Year
1986
Tongue
English
Weight
854 KB
Volume
4
Category
Article
ISSN
0734-2101

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