Looking onto application of low-k and ultra low-k materials within FEOL, high temperature load is one of the major challenges. But also temperature ranges below standard curing conditions are of special interest, e.g. for integration of transparent low-k materials into optical devices due to their s
β¦ LIBER β¦
On low-temperature properties of uniaxial dielectrics with a soft optic mode
β Scribed by Khmelnitskii, D. E.
- Book ID
- 121542296
- Publisher
- Springer
- Year
- 2014
- Tongue
- English
- Weight
- 154 KB
- Volume
- 118
- Category
- Article
- ISSN
- 1063-7761
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