High-Temperature Properties of a Low Dielectric Constant Organic Spin-on Glass for Multilevel Interconnects

✍ Scribed by Wang, C. Y.; Shen, Z. X.; Zheng, J. Z.

• Book ID: 115364031
• Publisher: Society for Applied Spectroscopy
• Year: 2001
• Tongue: English
• Weight: 259 KB
• Volume: 55
• Category: Article
• ISSN: 0003-7028
• DOI: 10.1366/0003702011953469