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On-line monitoring of parylene film deposition with quartz crystal microbalance (QCM)

✍ Scribed by Ga-Yeon Lee; Hyuk Ko; Ha-Wook Jung; Suk-Jin Ye; Moo-Hwan Kim; Jae-Chul Pyun

Book ID: 119355563
Publisher: Elsevier
Year: 2011
Tongue: English
Weight: 312 KB
Volume: 25
Category: Article
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2011.12.079

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