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On-line image and diffraction measurements in a modern TEM

✍ Scribed by M.J.C. de Jong


Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
81 KB
Volume
27
Category
Article
ISSN
0304-3991

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An investigation on the effect of underc
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## Abstract The effect of undercutting on the electrical parameters of general single and coupled quasi‐TEM lines in a multilayered dielectric is studied by an efficient quasistatic numerical method. Results are presented for characteristic impedance, propagation constant, and attenuation constant