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On-line detection and monitoring of plasma etch damage to semi-insulating GaAs

✍ Scribed by P.A.F. Herbert; M. Murtagh; P.V. Kelly; G.M. Crean; W.M. Kelly

Book ID: 103598964
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 457 KB
Volume: 21
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(93)90081-f

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