On light suppressed divacancy formation at photon assisted ion implantation of silicon

✍ Scribed by M.Yu. Barabanenkov; V.N. Mordkovich; V.V. Mikhnovich

• Book ID: 114169396
• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 534 KB
• Volume: 132
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(97)00403-5