𝔖 Bobbio Scriptorium
✦   LIBER   ✦

On-demand beam deflection system for PIXE milliprobe

✍ Scribed by J. Voltr; J. Král; J. Černý; J. Švejda


Book ID
114165272
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
100 KB
Volume
189
Category
Article
ISSN
0168-583X

No coin nor oath required. For personal study only.


📜 SIMILAR VOLUMES


Calibrated deflection system for electro
✍ M. Brisegård; M. Lidell; S. Steier; G. Stille 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 285 KB

A method for fast access of an electron beam probe to integrated circuit nodes is presented. Application of the method results in increased capacity for Electron Beam Testers (EBT). The method utilizes a calibrated postlens magnetic deflection unit. This unit can move the electron beam to any locati