๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

On-chip integrated optic mirrors in Ti: LiNbO3 by ion-beam micromachining

โœ Scribed by Syms, R.R.A.; Watkins, R.E.J.


Book ID
114454453
Publisher
The Institution of Electrical Engineers
Year
1987
Weight
936 KB
Volume
134
Category
Article
ISSN
0267-3932

No coin nor oath required. For personal study only.


๐Ÿ“œ SIMILAR VOLUMES


Fabrication of high-aspect-ratio submicr
โœ Shizhuo Yin ๐Ÿ“‚ Article ๐Ÿ“… 1999 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 150 KB ๐Ÿ‘ 2 views

The fabrication of high-aspect-ratio submicron-to-nanometer range microstructures in LiNbO using a state-of-the-art Schlum-3 ( ) berger AMS 3000 focused ion-beam FIB system is presented. The submicron structures with about 350 nm width and 1600 nm depth are fabricated by employing XeF gas-assisted g