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On batch homogeneity in horizontal CVD reactors (I). Model of heating the process gas

✍ Scribed by Dr. F. Richter

Publisher: John Wiley and Sons
Year: 1983
Tongue: English
Weight: 604 KB
Volume: 18
Category: Article
ISSN: 0232-1300
DOI: 10.1002/crat.2170180416

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