Off-axis electron holography of electrostatic potentials in unbiased and reverse biased focused ion beam milled semiconductor devices

✍ Scribed by A. C. TWITCHETT; R. E. DUNIN-BORKOWSKI; R. J. HALLIFAX; R. F. BROOM; P. A. MIDGLEY

• Book ID: 110735897
• Publisher: John Wiley and Sons
• Year: 2004
• Tongue: English
• Weight: 388 KB
• Volume: 214
• Category: Article
• ISSN: 0022-2720
• DOI: 10.1111/j.0022-2720.2004.01328.x