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OES study of the gas phase during diamond films deposition in high power DC arc plasma jet CVD system

✍ Scribed by Zu-Yuan, Zhou; Guang-Chao, Chen; Wei-Zhong, Tang; Fan-Xiu, Lü


Book ID
121311963
Publisher
Institute of Physics
Year
2006
Tongue
English
Weight
226 KB
Volume
15
Category
Article
ISSN
1009-1963

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