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Diagnosis of gas phase near the substrate surface in diamond film deposition by high-power DC arc plasma jet CVD

✍ Scribed by Zuyuan Zhou; Guangchao Chen; Bin Li; Weizhong Tang; Fanxiu Lv


Book ID
117695386
Publisher
Chinese Electronic Periodical Services
Year
2007
Tongue
English
Weight
381 KB
Volume
14
Category
Article
ISSN
1005-8850

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