Obtainment of textured films of aluminum nitride by thermochemical nitridation of sapphire

✍ Scribed by Kh. Sh-o. Kaltaev; N. S. Sidel’nikova; S. V. Nizhankovskiy; A. Y. Dan’ko; M. A. Rom; P. V. Mateychenko; M. V. Dobrotvorskaya; A. T. Budnikov

• Book ID: 111444494
• Publisher: Springer
• Year: 2009
• Tongue: English
• Weight: 238 KB
• Volume: 43
• Category: Article
• ISSN: 1063-7826
• DOI: 10.1134/s1063782609120069