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Obtaining Al2 O3 films for optical purposes by ac magnetron sputtering

✍ Scribed by Meshkov, B. B.; Yakovlev, P. P.

Book ID
115400714
Publisher
Optical Society of America
Year
2000
Tongue
English
Weight
35 KB
Volume
67
Category
Article
ISSN
1070-9762

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Al 2 O 3 films were deposited by reactive ionized magnetron sputtering and their hardness was measured by nanoindentation. The magnetron was powered with a pulsed DC power supply, and the substrate was negatively biased with a pulsed DC voltage supply. An RF powered coil was located above the substr