Thin films of YBazCuaO+x are deposited on MgO substrates via dc magnetron sputter technic. The thicknesses varry between 1Onm and 500nm. The films are patterned by dry etching method. Narrow stripes with widths down to 1 urn are obtained without serious degradation, e.g. Tc,ocf > 85K and Tc < 1.6K.
✦ LIBER ✦
Observation of symmetric patterns in the flux distribution of thin YBa2Cu3O7−x films
✍ Scribed by P. Brüll; D. Kirchgässner; P. Leiderer
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 638 KB
- Volume
- 182
- Category
- Article
- ISSN
- 0921-4534
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