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Observation of surface topography using an RBS microbeam

✍ Scribed by A. Simon; F. Pászti; I. Uzonyi; A. Manuaba; Á.Z. Kiss; I. Rajta

Book ID
114169638
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
549 KB
Volume
136-138
Category
Article
ISSN
0168-583X

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## Abstract This paper describes section topography using an X‐ray microbeam and a novel slit having a V‐shaped crevice (V‐slit). The V‐slit is characterized by a sharp‐pointed exponential transmission curve, which enables depth‐resolved imaging with high spatial resolution. An iterative deconvolut