Observation of adsorption site of molecules and atoms provided by the pulsed laser deposition method on Si(1 1 1)-7 × 7 surface

✍ Scribed by A. Yokotani; Y. Okazaki; K. Nurulhusna; M. Tode; Y. Takigawa

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 756 KB
• Volume: 32
• Category: Article
• ISSN: 0925-3467
• DOI: 10.1016/j.optmat.2010.02.010

✦ Synopsis

We have observed the initial stage of the film deposition process by pulsed laser deposition method (PLD) on the Si(1 1 1)-7 Â 7 surface to obtain the information of the interface between the substrate and the films. In the present work, we have concentrated to observe the initial stages for b-FeSi 2 and SiC thin films fabricated by PLD method. We used an ultra-high-vacuum scanning tunneling microscope (UHV-STM) for the observation. Fe, Si, e-FeSi, HOPG and C 60 targets were used for the PLD experiment. Our results suggest that particles ablated from Fe, Si and HOPG targets adsorbed onto the substrate surface as single atom, e-FeSi as a pair and C 60 as a cluster of three molecules. We also found that the particles ablated from the Fe, Si, e-FeSi and HOPG targets which has a dangling bond preferred to adsorb onto adatom that has a dangling bond as well, whereas the particles ablated from the C 60 target which is electrically neutral preferred to adsorb onto the mechanical structures of the surface.

These results are expected to be useful information for fabrication of the b-FeSi 2 and SiC thin films of good quality.