O+, O+2, O+3 and O+4 ions in Ar-O2 sputtering discharges : comments on “Oxidation mechanism in rf CO2 plasma”, Vacuum, 36, 85 (1986): Carolyn Rubin Aita and Michel E Marhic, Vacuum, 38, 1988, 37–38

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 141 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90970-6