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Numerical study of laser-induced surface acoustic waves in different thickness pipes

✍ Scribed by Yuejuan He; Rihong Zhu; Zhonghua Shen; Jian Lu; Xiaowu Ni

Book ID
115367355
Publisher
Optics InfoBase
Year
2005
Tongue
English
Weight
302 KB
Volume
3
Category
Article
ISSN
1671-7694

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## Abstract In this paper we evaluate the correlation between UV light absorption of SOG (spin‐on glass) low dielectric constant (low‐__k__) films and chemical changes induced by an excimer UV source at several wavelengths: 172 nm, 222 nm, and 308 nm. Low‐__k__ absorption in the UV range was measur