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Numerical studies on the nonequilibrium inductively coupled plasma with metal vapor ionization

✍ Scribed by Suekane, T.; Taya, T.; Okuno, Y.; Kabashima, S.

Book ID: 117862818
Publisher: IEEE
Year: 1996
Tongue: English
Weight: 713 KB
Volume: 24
Category: Article
ISSN: 0093-3813
DOI: 10.1109/27.533124

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