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Numerical simulation for the discharge mechanism of a TP-D plasma source

✍ Scribed by Shinichi Takeshiro; Kazuo Takayama; Tadatsugu Hatori; Tsuguhiro Watanabe

Book ID
113278744
Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
144 KB
Volume
21
Category
Article
ISSN
0168-583X

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