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Numerical modeling of a micromachined thermal conductivity gas pressure sensor

✍ Scribed by Allegretto, W.; Bing Shen; Haswell, P.; Zhongsheng Lai; Robinson, A.M.


Book ID
119777860
Publisher
IEEE
Year
1994
Tongue
English
Weight
1013 KB
Volume
13
Category
Article
ISSN
0278-0070

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