Numerical analysis for conduction mechanism of thin oxide-nitride-oxide films formed on rough poly-Si

✍ Scribed by N. Matsuo; H. Fujiwara; T. Miyoshi; T. Koyanagi

• Book ID: 126611705
• Publisher: IEEE
• Year: 1996
• Tongue: English
• Weight: 364 KB
• Volume: 17
• Category: Article
• ISSN: 0741-3106
• DOI: 10.1109/55.484122