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Numerical analysis, design and experimentation of an annular induction plasma installation

โœ Scribed by Fouladgar, J.; Mimoune, S.M.; Develey, G.


Book ID
121800144
Publisher
IEEE
Year
1998
Tongue
English
Weight
445 KB
Volume
34
Category
Article
ISSN
0018-9464

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## Abstract A new microwave annular waveguide plasma source with slot antennas is introduced in this paper. The distributions of electromagnetic field within the rectangular waveguide and the annular waveguide are simulated and analyzed, and the relationship between the distributions of the electro