Nucleation, growth, and phase transformation mechanism of Ge2Sb2Te5thin films
β Scribed by Kim, Eun Tae ;Lee, Jeong Yong ;Kim, Yong Tae
- Publisher
- John Wiley and Sons
- Year
- 2009
- Tongue
- English
- Weight
- 473 KB
- Volume
- 206
- Category
- Article
- ISSN
- 0031-8965
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β¦ Synopsis
Abstract
The nucleation, growth, and metastableβtoβstable phase transformation behavior of Ge~2~Sb~2~Te~5~ thin film were studied by means of transmission electron microscopy. The results confirm that nucleation begins at the surface of the film and proceeds by growth of grains through the thickness of film. Also, the result provides further grounds to the suggestion that some of the Ge~2~Sb~2~Te~5~ grains grow with an elongated grain shape to reduce interface energy between crystalline and amorphous phases at the initial stage of crystallization. We find edge dislocations in the metastableβtoβstable phase transition region. We think these edge dislocations can explain the metastableβtoβstable phase transformation mechanism as a result of vacancy diffusion.
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