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Nucleation and initial growth processes of diamond thin films for stripper foils

✍ Scribed by Takeshi Tachibana; Chikara Ichihara; Nobuyuki Kawakami; Yoshihiro Yokota


Book ID
103857018
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
363 KB
Volume
590
Category
Article
ISSN
0168-9002

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## Abstract The reactive ion etching (RIE) procedures were applied for mechanically polished {111} diamond substrates surfaces using oxygen and hydrogen gas sources to improve the crystalline quality of chemical vapor deposited (CVD) n‐type diamond layers. The growth of phosphorus‐doped films was p