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Nucleation and growth of nanocrystalline diamond on NaCl substrate by RF-PECVD

✍ Scribed by Xu, Q.; Yang, G.M.

Book ID
121386085
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
602 KB
Volume
74
Category
Article
ISSN
0022-3697

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## Abstract By optimizing seeding techniques and plasma parameters for deposition, nanocrystalline diamond (NCD) films were deposited on different sorts of substrates with varying parameters such as temperature and methane content. Results of this optimization process were analysed by SEM, XRD, Ram