𝔖 Bobbio Scriptorium

✦ LIBER ✦

Nuclear reaction analysis of shallow B and BF2 implants in Si: M C Ridgway et al, J appl Phys, 62, 1987, 3682–3687

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 144 KB
Volume: 39
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(89)90562-9

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Comparison of electrical defects in Ge+

Comparison of electrical defects in Ge+ and Si+ preamorphized BF2-implanted silicon: J R Ayres et al, J appl Phys, 62, 1987, 3628–3632

📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 149 KB