Novel Sub-10-nm Gate-All-Around Si Nanowire Channel Poly-Si TFTs With Raised Source/Drain

✍ Scribed by Y. Lu; P. Kuo; Y. Wu; Y. Chen; T. Chao

• Book ID: 126735957
• Publisher: IEEE
• Year: 2011
• Tongue: English
• Weight: 495 KB
• Volume: 32
• Category: Article
• ISSN: 0741-3106
• DOI: 10.1109/LED.2010.2093557