Novel photosensitive polymer based on polycarbodiimide and photoamine generator

✍ Scribed by Amane Mochizuki; Michie Sakamoto; Masahiro Yoshioka; Takahiro Fukuoka; Kazumasa Takeshi; Mitsuru Ueda

• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 214 KB
• Volume: 38
• Category: Article
• ISSN: 0887-624X
• DOI: 10.1002/(sici)1099-0518(20000115)38:2<329::aid-pola7>3.0.co;2-7

✦ Synopsis

A novel photosensitive polymer based on end-capped polycarbodiimide (E-PCD) and the photoamine generator N-{ [(4,5-dimethoxy-2-nitrobenzyl)oxy]car-bonyl}-2,6-dimethylpiperidine (1) was developed. The E-PCD was prepared by polycondensation of tolylene-2,4-diisocyanate in the presence of 3-methy-1-phenyl-2-phospholene-1-oxide as a catalyst. The reaction of carbodiimide and secondary amine was studied. The nucleophilic addition of amine to the carbodiimide moiety proceeded smoothly and provided a guanidine base that acted as a crosslinking agent. A lithographic evaluation of the system of E-PCD and 1 revealed that the dissolution rate of the exposed area after the postexposure bake decreased drastically, although no obvious change of the dissolution rate in the unexposed area was observed. The E-PCD containing 10 wt % 1 functioned as a negative working photosensitive polymer when it was exposed to 365-nm UV light, postbaked at 120 °C for 5 min, and developed with toluene at 25 °C.