Novel Method for Fabrication of Tri-Gated Poly-Si Nanowire Field-Effect Transistors With Sublithographic Channel Dimensions

✍ Scribed by Lee, Ko-Hui; Lin, Horng-Chih; Huang, Tiao-Yuan

• Book ID: 120673604
• Publisher: IEEE
• Year: 2013
• Tongue: English
• Weight: 456 KB
• Volume: 34
• Category: Article
• ISSN: 0741-3106
• DOI: 10.1109/LED.2013.2256771