Novel effects of heating rate on the activation/recrystallization of boron-implanted Si substrates : M. H. Juang and H. C. Cheng. Solid-State Electronics35(7), 969 (1992)

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 113 KB
• Volume: 33
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(93)90242-q